VAT HV Pendulum Control Valve

HV
Specifically designed for semiconductor and display panel production systems, this valve sets a new standard for downstream pressure control and isolation, delivering the highest level of controllability across a wide conductance range
The 65.3 series features a preset motion sequence that adapts to individual and continuously changing process parameters. With an improved integrated position-controlled motor and a more powerful 32-bit data processing system (IC2+CPA), it enhances process controllability and availability, enabling ultra-fast and precise control of each pendulum valve position.
The optimized gate movement ensures smooth operation, with a dampened closing motion that eliminates impact vibrations commonly found in conventional valves. This guarantees non-contact airflow control during reciprocating movement and uniform airtight sealing across all areas during the sealing motion, achieving impact-free operation, zero particle activation, and no particle release.
Plug-and-play construction allows for easy installation without the need for disassembly or alignment.

尺寸
DN 100~350mm(4"~14")(8"~22“)

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