VAT UHV Gate Valve

Feature

• UHV
• The 10.8 gate valve series is equipped with VAT’s patented VATLOCK technology, specifically designed to ensure friction-free operation on the plate, providing reliable sealing without lubricants, thereby eliminating the risk of particle contamination.
• With metal bonnet seals, bellows-sealed feedthroughs, and vulcanized plate seals, the valve achieves ultra-high vacuum (UHV) performance, while its robust stainless steel housing withstands temperatures up to 250°C.。
• A special locking mechanism in the closed position enhances leak isolation and fail-safe valve operation.
• The valve comes with a solenoid valve for onboard or external installation, offering various actuator solenoid options (standard voltage: 24 VDC).
• Modular design allows seamless integration into any UHV system standards, making it ideal for turbo and cryopump isolation at the vacuum pump front end. It delivers exceptional performance across semiconductor, FPD, surface deposition coating, and scientific research applications.

VATLOCK Principle

VATLOCK Open

VATLOCK Closed