VAT HV Pendulum Valve

Feature

• HV
• With an exceptionally smooth, low-vibration switching motion, it achieves outstanding low particle count and low particle activation performance, along with extremely low residual outgassing (RGA).
• The 16.2 series is an ideal choice for demanding semiconductor applications requiring corrosion-resistant isolation. Meanwhile, the larger 16.8 pendulum valve is particularly suited for high-flow isolation applications such as large-area deposition coating or FPD production.
• Unique split-body design allows for easy and fast maintenance without the need to disassemble pipeline connections.
• The slim design enables direct installation into process chambers, saving space typically required for chamber-valve-pump connections.