Entegris Extreme Ultraviolet Light (EUV) Reticle Pods

Entegris provide defect-free EUV reticles protection during shipping, storage, handling and vacuum-transfer operations
Dual pod design offers an inner and outer pod to maintain a contamination-free environment. The EUV pod interfaces with production equipment such as metrology tools, scanners and stockers and is compliant with SEMI® Standard E152.

• 1008 Series EUV Pods
  Extreme ultraviolet light (EUV) reticle pod is designed to provide defect-free protection of EUV reticles during storage, handling and vacuum-transfer operations.