Entegris Reticle SMIF Pods

Advanced reticle handling systems that secure your valuable reticles during storage and transport

Entegris offers an array of Reticle SMIF Pods designed to protect, store and transport valuable lithography reticles. Our reticle pods offer advantages of a cost-effective design combined with an extremely high degree of contamination protection.

• 150 mm Single Reticle Pods
  The 150 mm single reticle pod is an advanced reticle handling system providing superior performance during storage and transport.


• Multiple Reticle Pods
  Reticle SMIF pods designed to protect, store and transport valuable lithography reticles.


• 200 mm Reticle SMIF Pod
  Entegris’ RSP-200 reticle SMIF pod provides high-reliability handling of 150 mm or 200 mm masks and reticles with or without pellicles.


• 150 mm Reticle SMIF Pods
  The 150 mm reticle SMIF pod is an advanced reticle handling system providing superior performance during storage and transport.