Entegris Mask Packages

Mask Packages engineered to provide secure mask protection and precise automation interface, increasing yields and minimizing unscheduled downtime

Entegris offer an array of Mask Packages that offer users the advantages of a cost-effective design combined with an extremely high degree of contamination protection.

• H91 Series Mask Packages
  Entegris’ mask packaging, H91 series, are ideal for masks or reticles with pellicles.


• H60 Series Mask Packages
  Entegris’ line of mask packages, H60 series, hold one mask or reticle and are manufactured and packaged in a cleanroom environment.


• H92 Series Mask Packages
  High impact resistance H92 Series mask packages provide excellent security for masks or reticles with pellicles.


• B80 Series Mask Packages
  Entegris’ B80 series of mask packages provide excellent security for masks and reticles with pellicles.


• Single Mask Pack 625
  Entegris’ single mask packages 625 provide excellent security for masks and reticles with pellicles.


• H68 Series Mask Packages
  Entegris’ mask packaging H68 series are ideal for masks or reticles with pellicles.