英特格 極紫外光（EUV）光罩傳送盒

英特格(Entegris)的雙吊艙設計提供了內部和外部吊艙，可維持無污染的環境，應用於極紫外光(EUV)微影技術的晶片大量生產，以保護製造過程中光罩的完整。

• 1008 Series EUV Pods
  Extreme ultraviolet light (EUV) reticle pod is designed to provide defect-free protection of EUV reticles during storage, handling and vacuum-transfer operations.