英特格 光罩組件

光罩組件的設計可提供光罩堅固的保護以及精確的自動化界面，提高產量並使突發性停機狀況大幅降低. 英特格(Entegris)所提供的一系列光罩套件，主要是為用戶提供低成本高效益之設計，並結合防污染之極高等級的優勢。
EUV pod光罩傳送盒與生產設備的連接比如測量工具，掃描儀和儲料器等是符合SEMI®標準E152。英特格2018開發出的EUV 1010 光罩盒已率先成為全世界第一個獲得ASML認證，可用於NXE:3400B及未來更先進機台的光罩盒產品。

• H91 Series Mask Packages
  Entegris’ mask packaging, H91 series, are ideal for masks or reticles with pellicles.


• H60 Series Mask Packages
  Entegris’ line of mask packages, H60 series, hold one mask or reticle and are manufactured and packaged in a cleanroom environment.


• H92 Series Mask Packages
  High impact resistance H92 Series mask packages provide excellent security for masks or reticles with pellicles.


• B80 Series Mask Packages
  Entegris’ B80 series of mask packages provide excellent security for masks and reticles with pellicles.


• Single Mask Pack 625
  Entegris’ single mask packages 625 provide excellent security for masks and reticles with pellicles.


• H68 Series Mask Packages
  Entegris’ mask packaging H68 series are ideal for masks or reticles with pellicles.