英特格 光罩傳送盒

先進的光罩處理系統在存儲和運送中可以保護好您價值不菲的光罩 英特格(Entegris)提供了一系列光罩傳送盒Reticle SMIF Pod，其設計是在保護，存儲和運輸時能有效地保護有價值的微影光罩。 Entegris光罩盒提供了具備低成本高效益和極高程度的污染防護的設計優點。

• 150 mm Single Reticle Pods
  The 150 mm single reticle pod is an advanced reticle handling system providing superior performance during storage and transport.


• Multiple Reticle Pods
  Reticle SMIF pods designed to protect, store and transport valuable lithography reticles.


• 200 mm Reticle SMIF Pod
  Entegris’ RSP-200 reticle SMIF pod provides high-reliability handling of 150 mm or 200 mm masks and reticles with or without pellicles.


• 150 mm Reticle SMIF Pods
  The 150 mm reticle SMIF pod is an advanced reticle handling system providing superior performance during storage and transport.