Entegris Gases

The right gas the right way

You need the right gas at the right time in the right package, and Entegris can help. When it comes to gas and gas delivery, go with the experts for your Arsine, Phosphine, Boron Trifluoride and Germanium Tetrafluoride needs.

• Arsine
  The right gas the right way.


• Phosphine
  Dangerous gases demand the safest technology.


• Boron Trifluoride
  A purely natural performer in the safest way.


• Enriched Boron Trifluoride
  Enrich your process, your safety and your purity.


• Enriched 72 Germanium Tetrafluoride
  Reduce your risk and increase effectiveness.


• Enriched Plus 72 Germanium Tetrafluoride
  Tailor your process and increase your throughput.