Entegris Gas Delivery Cabinet Systems

High-purity gas delivery systems

Entegris high-purity gas cabinet systems have been designed to deliver a full range of processed toxic gases subatmospherically, eliminating the risk of catastrophic gas release and ensuring a safer work environment.

• PDS® Delivery System
  A high-purity, auto-switchover gas distribution system. The PDS Delivery System supplies a continuous flow of process gas, even when the online source cylinder empties.


• TX-4™ Gas Delivery System
  The TX-4 ™ gas cabinet is designed to safely deliver highly toxic gases for semiconductor applications. The manifold is designed to minimize pressure loss, enabling maximum delivery of phosphine, arsine, or germane from sub-atmospheric gas sources.