Entegris Wafer Processing

Industry leading solutions for wafer processing

Entegris offering a complete range of wafer processing products to improve yields and increase productivity for device manufacturers as they advance their manufacturing process.

• 200 mm Accessories
  Optimize the cleanliness and performance of your wafer microenvironments with gaskets, replacement door assemblies, handles, and more.Contact us for information on A200 and M200 Maintenance Kits and Accessories.


• Chucks
  Our chuck solutions use innovative coating technologies which make for a very flat surface that prevents metal contamination, reduces particles and is durable to last millions of wafer cycles.


• CMP Pad Conditioners
  Planargem® CMP pad conditioners offer leading-edge, customer-tailored performance across all aspects of the CMP process. They ensure a consistent wafer removal rate, extend pad and conditioner life, and improve disc-to-disc uniformity.


• Post-CMP Cleaning Brushes
  Planarcore® PVA Brushes are designed to deliver superior performance and wafer-to-wafer uniformity in post CMP wafer cleaning applications.


• 300 mm Front Opening Unified Pods (FOUPs)
  Safely transport, store and protect 300 mm wafers with our line of front-opening unified pods (FOUPs).


• 200 mm Wafer Processing
  With over 50 years of experience in advanced wafer handling and transport, Entegris continues to provide safe and reliable 200 mm wafer processing solutions.


• 150 mm Wafer Processing
  Entegris offers variety of water shipping and handling solutions to safely transport silicon wafers in today's 150 mm fabs.


• 125 mm and Smaller Wafer Processing
  Broad offering of 125 mm and smaller wafer handling products to safely transport and protect silicon wafers.


• Labware
  Tweezers, tongs, strainers, trays, and other labware products.