VAT HV Transfer Valve

Feature

• HV
• Patented MONOVAT intelligent structural technology integrates the seal by vulcanizing it onto the valve seat, ensuring long-lasting and reliable sealing with low particle release and reduced outgassing.
• A specially designed soft-start closing mechanism minimizes mechanical impact, making it ideal for load lock and chamber isolation in 200mm and 300mm semiconductor wafer production.
• Optional liquid cooling mechanism is available, with the capability to upgrade to UHV (Ultra-High Vacuum) levels.