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Entegris Premium Silicon Carbide


SUPERSiC® Materials


Entegris' line of high-purity silicon carbide products are marketed under the SUPERSiC® trade name. SUPERSiC is a unique silicon carbide material created and customized precisely for specific applications. Entegris provide a wide array of infiltration materials, cleaning options and coatings to create the material specifications that meet your precise needs.

  • SUPERSiC® Silicon Carbide Components
    Near net parts are machined in graphite, purified and subjected to a proprietary conversion process which substitutes pure silicon atoms for carbon atoms. The result is SUPERSIC®, our high-purity silicon carbide.

  • SUPERSiC® Silicon Carbide
    Our unique conversion process produces the highest quality silicon carbide products available on the market today. We offer a range of SUPERSiC® options to meet your demanding requirements.
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