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Entegris Disk Process Carriers


Entegris' process carriers fits 48 mm, 0.63 mm (2", 0.025") to 95 mm, 1.27 mm (3.75", 0.05") disks with tighteners in the lower position to reduce disk tilt


Radial disk contact provides a better fit for the disk by curving the disk contact area. Disk lead-in helps "lead" the disk into the slot with a V-shaped featureIsland slots reduce the tippiness when the carrier and disks are submerged in liquid.
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