Sealing systems

For decades, we have been a trusted provider of essential sealing components with Chemraz® perfluoroelastomers (FFKM). A pioneer of cleanroom manufacturing, we continue to develop new elastomeric compounds with increased plasma resistance and reduced particulation for enhanced productivity and cleanliness. In addition, Extensis® molding capability has enabled the development of custom, large-scale seals for use in FPD (flat panel display) production. As the semiconductor industry continues to evolve, our sealing solutions will keep pace, ensuring your next generation technology is realized.

Designs

Dovetail® Seals

Extensis® Custom, Large-Scale Seals

KF Fitting Seals

Metal Spring Energized (MSE®)

Materials

Chemraz
513: Universal Compound
520: Withstands High Loads
543: Universal Compound
547: Exceptional Fluorine Plasma Resistance
550: Carbon-Loaded Compound
551: Chemical Resistance at High Temperatures
570: Very Low Contaminants
571: Durable in Wet Applications
592: High Strength & Purity
629: Resists Aggressive Plasmas
639: Enhanced Plasma Resistance
640: Excellent Fluorine & Oxygen Resistance
653: High Temperature, Carbon-Loaded Compound
655: High Temperature, White Compound
656: Low Metallic Ion Content
657: Minimal Particulation in Dry Etch
E38: Minimal Contamination in Dry Plasma
SubFab
XCD: Superior Thermal Resistance
XPE-HP: Provides Superior O2, Ozone, and UV
XPE: O2 Plasma Resistance
XRZ: Corrosion Resistance
XTR: Exceptional Performance in ClF3 Environments

Viton Oring
FKM 706: High Purity Fluoroelastomer
FKM 742: High-Performance Fluoroelastomer

Minimal Contamination in FPD Processing
FPD Blue™ 707: Minimal Contamination in FPD Processing