Sapphire
SAPPHIRE
Sapphire is an excellent material for semiconductor equipment components subject to fluorine radical exposure. Gavish offers equipment components fabricated form three forms of sapphire, addressing applications form etchant gas delivery tubes to optical windows. These fabrication techniques, combined with excellent machining and surface preparation technology, are ability to supply optimal component designs and shapes.Product Feature
- Resistance to fluorine radicals from process gases extends service life of parts.
- High compressive strength for lift pins minimzes breakage and vibration.
- High hardness proovides lower particulate generation and a cleaner process environment.
- High-temperature capability ensures operations to exceed 1000 ℃(1832℉) for semiconductor processing applications such as RTP.
- Excellent optical transmissivity for IR to UV wavelengths allows for use in expanded applications
Product:
■ Coated & Metallized Optics
■ Sapphire Tubes & Injectors
■ Custom Fabricated Sapphire
■ Sapphire Rods & Lift Pins
