Entegris Gas Purification Systems

Automatic regenerating gas purification systems for the removal of contaminants down to the part-per-trillion level

Our Entegris stand-alone gas purifications systems offer in-situ regeneration with advanced control to meet your requirements. Plus, our safer, environmentally-friendly systems are available in many configurations to meet your specific application.

• GateKeeper® Gas Purification Systems
  GateKeeper® Gas Purification Systems effectively remove gaseous contaminants down to part-per-trillion levels with inorganic media. You can trust our cost-effective GateKeeper® systems to help you avoid contamination of your process without damaging tools.


• Aeronex® Gas Purification Systems
  Aeronex® gas purification systems are stand-alone systems offering in-situ regeneration with advanced controls. The multi-bed design guarantees a continuous supply of pure gas so there is no need to send a purifier back for regeneration or to install a replacement purifier.