Entegris Photochemical Dispense Pumps

State-of-the-art, two-stage dispense technology enables independent filtration and dispense

Entegris two-stage dispense technology enables independent filtration and dispense with a built-in Impact® 8G filter manifold. Available in models for low, medium and high viscosity fluids.

• IntelliGen® LV Dispense Systems
  New platform two-stage system with built in dual PT sensors enables independent dispense and filtration of low viscosity fluids.


• IntelliGen® HV Dispense Systems
  Two-stage system with built in dual PT sensors enables independent dispense and filtration of high-viscosity fluids


• IntelliGen® MV Dispense Systems
  New platform two-stage system with built in dual PT sensors enables independent dispense and filtration of medium-viscosity fluids.


• IntelliGen® ULV Dispense Systems
  Leading-edge, two-stage system with built in dual PT sensors not only enables independent dispense and filtration, but also achieves defect reduction of low-viscosity fluids.


• IntelliGen® Mini Dispense Systems
  Two-stage system with built in single PT sensor enables independent dispense and filtration of low-viscosity fluids.