英特格 氣體輸送櫃系統

英特格(Entegris)的高純度氣櫃系統的設計主旨是在低壓下輸送各種製程的有毒氣體，消除災難性氣體釋放的風險並確保更安全的工作環境。

• PDS® Delivery System
  A high-purity, auto-switchover gas distribution system. The PDS Delivery System supplies a continuous flow of process gas, even when the online source cylinder empties.


• TX-4™ Gas Delivery System
  The TX-4 ™ gas cabinet is designed to safely deliver highly toxic gases for semiconductor applications. The manifold is designed to minimize pressure loss, enabling maximum delivery of phosphine, arsine, or germane from sub-atmospheric gas sources.