英特格 液體純化器

在關鍵製程液流中,控管金屬離子和其他污染物,是改善運作效率和促進技術進步的最佳方案。英特格(Entegris)可提供PTFE，PS和UPE膜以及離子交換介質，每種淨化器都設計成可減少來自金屬離子和其他污染物所引起的缺陷。

• Purasol™ SP/SN Solvent Purifiers
  Ultraclean solvent purification with total metal removal performance.


• Protego® Plus IPA Purifier
  High-efficiency solvent purifier/filter providing metals and particle removal at the device level in critical clean IPA applications.


• Protego® Plus HT Purifier
  All-in-one purifier/filter designed for use in critical DI water cleaning applications operating at high temperatures (up to 80°C).


• Protego® Plus LT Purifier
  All-in-one purifier/filter designed for use in critical DI water cleaning applications operating at low temperatures (less than 60°C).