英特格 氣體純化系統

英特格(Entegris)獨立氣體純化系統採用先進的控制技術提供原位再生，自動再生氣體純化系統可將污染物去除至 PPT 等級。 另外還提供安全性，環保系統等配置供選擇，以滿足特定應用需求。

• GateKeeper® Gas Purification Systems
  GateKeeper® Gas Purification Systems effectively remove gaseous contaminants down to part-per-trillion levels with inorganic media. You can trust our cost-effective GateKeeper® systems to help you avoid contamination of your process without damaging tools.


• Aeronex® Gas Purification Systems
  Aeronex® gas purification systems are stand-alone systems offering in-situ regeneration with advanced controls. The multi-bed design guarantees a continuous supply of pure gas so there is no need to send a purifier back for regeneration or to install a replacement purifier.