英特格 氣體擴散器

英特格(Entegris)氣體擴散器與大多數真空系統的設計可以相容，且易於安裝或改裝至Load lock腔體，冷卻腔體，傳輸腔體和製程腔體。可以在快速破真空至大氣壓力時，有效防止落塵掉入腔體中。

• Chambergard™ Gas Diffusers
  Chambergard™ fast vent diffusers provide rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber, increasing system throughput by minimizing load lock vent cycle times. They combine the flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput.